Gibaek Kim1, Kyoungtae Kim2, Hyunok Maeng1, Haebum Lee1, Kihong Park This email address is being protected from spambots. You need JavaScript enabled to view it. 1

 

National Leading Research Laboratory, School of Environmental Science and Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea
Memory Manufacturing Engineering Team, Semiconductor Business, Samsung Electronics Co., Ltd., Hwaseong 18448, Korea


 

Received: August 23, 2018
Revised: August 23, 2018
Accepted: September 4, 2018

Download Citation: ||https://doi.org/10.4209/aaqr.2018.08.0312  

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Cite this article:

Kim, G., Kim, K., Maeng, H., Lee, H. and Park, K. (2019). Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles. Aerosol Air Qual. Res. 19: 455-460. https://doi.org/10.4209/aaqr.2018.08.0312


HIGHLIGHTS

  • Application of LIBS for simultaneous detection of elements in contamination particles.
  • A portable aerosol-LIBS chamber to be used in process application.
  • Using the sheath air-focusing nozzle to improve hitting efficiency.
  • Test of various detector and lens types for particle detection.
 

ABSTRACT


Laser-induced breakdown spectroscopy (LIBS) has been increasingly used in recent years to rapidly detect the elemental compositions of various materials in different media (i.e., solids, liquids, and gases). In this study, an aerosol-LIBS system was developed for the real-time monitoring of process-induced particles generated during semiconductor manufacturing. The developed system consists primarily of a laser, a spectrometer, optics, and an aerosol chamber; the last element was constructed for the application of the aerosol-LIBS to various semiconductor manufacturing processes and comprises exhaust tubes and low pressure and high temperature chambers. The system was evaluated for its sensitivity to various elements using laboratory-generated aerosols and successfully detected P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines. Further evaluation of the aerosol-LIBS is ongoing.


Keywords: Laser-induced breakdown spectroscopy (LIBS); Process-induced particles; Real-time monitoring; Spectrometer.



Aerosol Air Qual. Res. 19 :455 -460 . https://doi.org/10.4209/aaqr.2018.08.0312  


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