Electron Beam Assisted Gas Phase Synthesis of SiO2 Nanoparticles in an Ambient Condition

Received: May 17, 2012
Revised: July 17, 2012
Accepted: July 17, 2012
Download Citation: RIS|BibTeX|https://doi.org/10.4209/aaqr.2012.05.0133  

Cite this article:
Kim, J.H., Sohn, Y., Kim, I., Han, B. and Shin, W.G. (2012). Electron Beam Assisted Gas Phase Synthesis of SiO2 Nanoparticles in an Ambient Condition. Aerosol Air Qual. Res. 12: 1467-1471. https://doi.org/10.4209/aaqr.2012.05.0133

ABSTRACT

This study presents a novel use of an electron beam irradiation system for the gas phase synthesis of nanoparticles, and demonstrates that SiO₂ nanoparticles can be synthesized in ambient conditions. The formation of SiO₂ nanoparticles is confirmed by the vibrational modes shown in FT-IR spectra, and the binding energy of Si 2p in the X-ray photoelectron spectrum. In this work, nanoparticles with average diameters of 210 nm and 73 nm were produced. The average particle size was controlled by adjusting the residence time of the precursor vapor.

Keywords: Electron beam irradiation; SiO2 nanoparticle; Gas phase synthesis