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Keyword: Airborne molecular contaminants (AMC)

Evaluation of Hindrance to the Growth of SiN Passivation Layer by Contamination of Fluoride Ions in Front Opening Unified Pod (FOUP)

Gil Joo Song, Sung Min Hwang, Soo Jong Koo, Hyoung Ryeun Kim, Hee Chang Jang, Jeong Hoon Hong, Hyun Yul Park, Euiji Choi, Jin Young Kim, Tae Yong Noh, Eungsun Lee, Seoung-Kyo Yoo

DOI: 10.4209/aaqr.2014.10.0238 | Volume: 15| Issue: 5| Pages: 2175-2183
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