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Keyword: Clean room

Dimensional and Elemental Analysis of Particulate Contaminations on Silicon Wafers

Hsunling Bai , Yuhao Kang, Chengchang Li

DOI: 10.4209/aaqr.2002.06.0006 | Volume: 2| Issue: 1| Pages: 53-60
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Long-term Multiple Chemical Exposure Assessment for a Thin Film Transistor Liquid Crystal Display (TFT-LCD) Industry

Ying-Fang Wang, Shih-Min Wang, Yu-Chieh Kuo, Chungsik Yoon, Ya-Fen Wang, Perng-Jy Tsai

DOI: 10.4209/aaqr.2017.08.0299 | Volume: 17| Issue: 11| Pages: 2891-2900
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