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Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles

Category: Aerosol Physics and Instrumentation

Article In Press
DOI: 10.4209/aaqr.2018.08.0312

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Gibaek Kim1, Kyoungtae Kim2, Hyunok Maeng1, Haebum Lee1, Kihong Park 1

  • 1 National Leading Research Laboratory, School of Environmental Science and Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea
  • 2 Memory Manufacturing Engineering Team, Semiconductor Business, Samsung Electronics Co., Ltd., Hwaseong 18448, Korea


Application of LIBS for simultaneous detection of elements in contamination particles.
A portable aerosol-LIBS chamber to be used in process application.
Using the sheath air-focusing nozzle to improve hitting efficiency.
Test of various detector and lens types for particle detection.


Laser-induced breakdown spectroscopy (LIBS) has been increasingly used in recent years to rapidly detect the elemental compositions of various materials in different media (i.e., solids, liquids, and gases). In this study, an aerosol-LIBS system was developed for the real-time monitoring of process-induced particles generated during semiconductor manufacturing. The developed system consists primarily of a laser, a spectrometer, optics, and an aerosol chamber; the last element was constructed for the application of the aerosol-LIBS to various semiconductor manufacturing processes and comprises exhaust tubes and low pressure and high temperature chambers. The system was evaluated for its sensitivity to various elements using laboratory-generated aerosols and successfully detected P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines. Further evaluation of the aerosol-LIBS is ongoing.


Laser-induced breakdown spectroscopy (LIBS) Process-induced particles Real-time monitoring Spectrometer

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