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Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles

Category: Aerosol Physics and Instrumentation

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DOI: 10.4209/aaqr.2018.08.0312
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Gibaek Kim1, Kyoungtae Kim2, Hyunok Maeng1, Haebum Lee1, Kihong Park 1

  • 1 National Leading Research Laboratory, School of Environmental Science and Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Republic of Korea
  • 2 Memory Manufacturing Engineering Team, Semiconductor Business, Samsung Electronics Co., Ltd., Hwaseong 18448, Republic of Korea

Highlights

Application of LIBS for simultaneous detection of elements in contamination particles.
A portable aerosol-LIBS chamber to be used in process application.
Using the sheath air-focusing nozzle to improve hitting efficiency.
Test of various detector and lens types for particle detection.


Abstract

Laser-induced breakdown spectroscopy (LIBS) has been increasingly used in recent years to rapidly detect the elemental compositions of various materials in different media (i.e., solids, liquids, and gases). In this study, an aerosol-LIBS system was developed for the real-time monitoring of process-induced particles generated during the semiconductor manufacturing process. The aerosol-LIBS system developed for the purpose of this study consists primarily of a laser, a spectrometer, optics, and an aerosol chamber. A new aerosol chamber was constructed for application of the aerosol-LIBS to various semiconductor manufacturing processes, comprising exhaust tubes and low pressure and high temperature chambers. The aerosol-LIBS system was evaluated using laboratory-generated aerosols for the detection of various elements. The result was that P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is ongoing.

Keywords

Laser-induced breakdown spectroscopy (LIBS) Process-induced particles Real-time monitoring Spectrometer


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