Carbonyl sulfide (COS) are usually yielded from the petrifaction industry or steel-making plants. In this study, a low-temperature radio-frequency (RF) plasma approach was used to destruct COS for removing sulfur. The results showed that at an inlet O2/COS molar ratio of 3, the removal efficiency of COS reached 98.4% at 20 W and 4000 N/m2, with the major product being SO2 with small amounts of sulfur deposition. The removal efficiency of COS was lower in the H2-containing condition than in the O2-containg one. However, when H2 was added into the COS/N2 mixtures, the products, including major elemental sulfur with CS2 as a minor product, were easily collected and recovered.